Form Type:  SD
Filing Date:  5/25/2018 
CIK:  0000704532 
Address:  16 JONSPIN ROAD 
City, State, Zip:  WILMINGTON, Massachusetts 01887 
Telephone:  978-253-6200 
Fiscal Year:  12/26 
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Description of Business
Onto Innovation is a worldwide leader in the design, development, manufacture and support of process control tools that perform macro-defect inspection and 2D/3D optical metrology, lithography systems, and process control analytical software used by bare silicon wafer manufacturers, semiconductor wafer fabricators, and advanced packaging manufacturers. Our products are also used for process control in a number of other high technology markets, including manufacturing of light emitting diodes ("LED"), vertical-cavity surface-emitting lasers ("VCSEL"), micro-electromechanical systems ("MEMS"), CMOS image sensors ("CIS"), compound semiconductor (SiC and GaN) power devices, RF filters and modules, data storage, and certain industrial and scientific applications.
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